Edge constrained optical membrane deformable mirror and method of fabricating
AssigneeXinetics, Inc.
InventorsJeffrey L. Cavaco, John A. Wellman
Life of this patent
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Abstract
Fabricating a deformable mirror by providing a plurality of actuators and a support structure supporting and at least partially surrounding the actuators; applying an optical membrane across the actuators and at least a portion of the support structure; the optical membrane including a first area, a second area and an intermediate area elastically decoupling the first and second areas; bonding the first area to the actuators and the second area to the support structure; and polishing the optical membrane.
Claims34
An edge constrained optical membrane deformable mirror comprising:
- a plurality of actuators;
- a support structure supporting and at least partially surrounding said actuators;
- an optical membrane extending across said actuators and at least a portion of said support structure, said optical membrane having a first area bonded to said actuators, a second area bonded to said support structure and an intermediate area elastically decoupling said first and second areas of said optical membrane, the stiffness of said intermediate area less than that of said first area.
A method of fabricating a deformable mirror comprising:
- providing a plurality of actuators and a support structure supporting and at least partially surrounding said actuators;
- applying an optical membrane across said actuators and at least a portion of said support structure;
- said optical membrane including a first area, a second area and an intermediate area elastically decoupling said first and second areas of said optical membrane the stiffness of said intermediate area less than that of said first area;
- bonding said first area to said actuators and said second area to said support structure;
- and
- polishing said optical membrane.
An edge constrained optical membrane deformable mirror comprising:
- a plurality of actuators;
- a support structure supporting and at least partially surrounding said actuators;
- an optical membrane extending across said actuators and at least a portion of said support structure, said optical membrane having a first area bonded to said actuators, a second area bonded to said support structure and an intermediate area elastically decoupling said first and second areas of said optical membrane, the thickness of said intermediate area less than that of said first area.
Dependencies are inferred from the claim text.