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US 7,547,005 B2Granted
System and method for delivering vapor
AssigneeAdvanced Energy Industries, Inc.
InventorsFernando Gustavo Tomasel, Justin Mauck, Juan Jose Gonzalez
Life of this patent
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Abstract
A system and method for providing a vapor are described. In one variation, liquid is placed in a containment vessel, and a pressure in the containment vessel is reduced below atmospheric pressure. The pressure in the vessel is monitored and the liquid is heated in response to the sensed pressure falling below a desired level. When needed, the vapor is delivered from the liquid containment vessel to the external system.
Claims4
A vapor delivery system, comprising:
- a chamber adapted to contain a liquid and a vapor from the liquid, wherein the chamber includes a port configured to couple the chamber to a vacuum so as to enable a pressure in the chamber to be lowered below atmospheric pressure;
- a vapor outlet arranged relative to the chamber so as to be capable of exhausting the vapor from the chamber;
- a pressure sensor within the chamber and arranged outside of the liquid to measure the pressure in the chamber, wherein the sensor is configured to provide a signal indicative of the pressure in the chamber;
- a heater coupled to the chamber and arranged so as to be capable of imparting heat to the liquid;
- and
- a control circuit coupled to the pressure sensor and the heater, wherein the control circuit is configured to increase an amount of heat imparted to the liquid by the heater in response to the signal indicating a drop in the pressure of the chamber.
3 more elements
Dependencies are inferred from the claim text.