Method for cleaning reaction container and film deposition system
AssigneeTokyo Electron Limited
InventorsKazuhide Hasebe, Daisuke Nozu, Dong-Kyun Choi
Life of this patent
Estimating the term…
Abstract
After semiconductor wafers are loaded into a reaction vessel, and ruthenium (Ru) film or ruthenium oxide film is formed, the interior of the reaction vessel is efficiently cleaned without contaminating the wafers. The interior of the reaction vessel is heated to a temperature of above 850° C. while the pressure inside the reaction vessel is reduced to, e.g., 133 pa (1 Torr)-13.3 Kpa (100 Torr), and oxygen gas is fed into the reaction vessel at a flow rate of, e.g., above 1.5 Lm, whereby the ruthenium film or the ruthenium oxide film formed inside the reaction vessel is cleaned off. In place of oxygen gas, active oxygen, such as O3, O* and OH*, etc. may be used.
Claims1
A method for cleaning the interior of a reaction vessel used to form a ruthenium film or ruthenium oxide film on a workpiece, comprising:
- establishing a low pressure of below 1.33 Kpa and a high-temperature atmosphere of above 850° C in the reaction vessel,
- supplying a cleaning gas into the reaction vessel, the cleaning gas consisting of oxygen radicals and hydroxyl group radicals in combination, and
- controlling temperature and pressure within the reaction vessel to clean the interior thereof of the ruthenium film or ruthenium oxide film.
Dependencies are inferred from the claim text.