Piezoresistive pressure sensor
AssigneeHoneywell International Inc.
InventorsEugen I Cabuz, Cleopatra Cabuz, Tzu-Yu Wang
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Abstract
A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first resistor and may have associated electrodes. The polymer element includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. The pressure sensor may also include a second polymer element that includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.
Claims27
A pressure sensor comprising:
- a housing portion with a fluid inlet coupled with a chamber, wherein fluid introduced in the fluid inlet enters the chamber;
- and
- a polymer substrate within the chamber of the housing portion and coated with piezoresistive material, wherein the piezoresistive material coated on the polymer substrate forms a first resistor, wherein the polymer substrate includes a first resistance value that changes to a second resistance value in a response to a predetermined condition.
A pressure sensor comprising:
- a housing with a fluid inlet fluidically coupled with a chamber;
- a first polymer element within the housing having a first resistor formed of piezoresistive material and at least one electrode;
- and
- a second polymer element within the housing having a second resistor formed of piezoresistive material and at least one electrode.
A process comprising:
- applying pressure at a fluid inlet, the fluid inlet coupled with a chamber of a housing and wherein fluid introduced in the fluid inlet enters the chamber;
- deflecting a polymer element having a piezoresistor, a first electrode and a second electrode deposited thereon, the polymer element within the chamber;
- and
- measuring a variation in resistance of the piezoresistor to calculate the applied pressure, wherein the variation in resistance is directly or indirectly proportional to the applied pressure.
Dependencies are inferred from the claim text.