Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
AssigneeWispry, Inc.
InventorsArthur S. Morris, III, John Qiang Huang
Life of this patent
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Abstract
Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
Claims11
A micro-electro-mechanical system (MEMS) variable capacitor system comprising:
- first, second, and third feed pads being spaced apart;
- a first feed line connected to the first feed pad and extending towards the second feed pad;
- a second feed line connected to the second feed pad and extending towards the third feed pad;
- third and fourth feed lines connected to the third feed pad and extending towards the first and second feed pads, respectively;
- a first capacitive plate being spaced apart from the first and third feed lines, wherein the first capacitive plate is movable with respect to at least one of the first and third feed lines for varying the capacitance between the first and third feed lines over a first predetermined capacitance range;
- and
- a second capacitive plate being spaced apart from the second and fourth feed lines, wherein the second capacitive plate is movable with respect to at least one of the second and fourth feed lines for varying the capacitance between the second and fourth feed lines over a second predetermined capacitance range.
Dependencies are inferred from the claim text.