Apparatus for forming a porous reaction injection molded chemical mechanical polishing pad
AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsDavid B. James, John V. H. Roberts
Life of this patent
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Abstract
The present invention provides an apparatus for forming a chemical mechanical polishing pad, comprising a tank with polymeric materials, a storage silo with microspheres, a isocyanate storage tank with isocyanates and a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres. The invention further provides a premix run tank for storing the pre-mixture, a mixer for forming a mixture of the pre-mixture and the isocyanates, a closed mold for reaction-injection molding the mixture and a vacuum for degassing at least one of the tank, isocyanate storage tank or the mold.
Claims8
An apparatus for forming a chemical mechanical polishing pad, comprising:
- a tank with polymeric materials;
- a storage silo with microspheres;
- an isocyanate storage tank with isocyanates;
- a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres, wherein the premix prep tank comprises a recirculation loop for recirculating the pre-mixture and controlling the bulk density of the pre-mixture, wherein the recirculation loop comprises an in line densitometer for monitoring the bulk density of the pre-mixture passing therethrough and controlling the bulk density;
- a premix run tank for storing the pre-mixture;
- a mixer for forming a mixture of the pre-mixture and the isocyanates;
- a closed mold for reaction-injection molding the mixture;
- and
- a vacuum for degassing at least one of the tank, isocyanate storage tank or the mold.
An apparatus for forming a chemical mechanical polishing pad, comprising:
- a first polyol storage tank with first polymeric materials;
- a storage silo with microspheres;
- an isocyanate storage tank with isocyanates;
- a premix prep tank for forming a pre-mixture of the first polymeric materials and the microspheres, wherein the premix prep tank comprises a recirculation loop for recirculating the pre-mixture and controlling the bulk density of the pre-mixture, wherein the recirculation loop comprises an in line densitometer for monitoring the bulk density of the pre-mixture passing therethrough and controlling the bulk density;
- a premix run tank for storing the pre-mixture;
- a mixer for forming a mixture of the pre-mixture and the isocyanates;
- at least a second polyol storage tank with second polymeric materials for providing the second polymeric materials to the mixture until a desired bulk density is reached;
- a closed mold for reaction-injection molding the mixture;
- and
- a vacuum for degassing at least one of the first and second polyol storage tanks, isocyanate storage tank or the mold.
An apparatus for forming a chemical mechanical polishing pad, comprising:
- a polyol storage tank with polymeric materials;
- a storage silo with microspheres;
- an isocyanate storage tank with isocyanates;
- a premix run/prep tank for forming a pre-mixture of the polymeric materials and the microspheres, wherein the premix run/prep tank comprises a recirculation loop for recirculating the pre-mixture and controlling the bulk density of the pre-mixture, wherein the recirculation loop comprises an in line densitometer for monitoring the bulk density of the pre-mixture passing therethrough and controlling the bulk density;
- a mixer for forming a mixture of the pre-mixture and the isocyanates;
- a closed mold for reaction-injection molding the mixture;
- and
- a vacuum for degassing at least one of the polyol storage tank, isocyanate storage tank or the mold.
Dependencies are inferred from the claim text.