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US 7,536,233 B1Granted
Method and apparatus for adjusting processing speeds based on work-in-process levels
AssigneeAdvanced Micro Devices, Inc.
InventorChandra Shekar Krishnaswamy
Life of this patent
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Abstract
The present invention provides a method and apparatus for adjusting tool processing speeds based on work-in-process levels. The method includes determining at least one work-in-process level associated with a first processing tool and modifying a processing speed associated with the first processing tool based on said at least one work-in-process level.
Claims28
A method of operating a semiconductor fabrication facility, comprising:
- determining at least one first work-in-process level associated with a first processing tool, said at least one first work-in-process level indicating a rate at which wafers are being provided to or processed by the first processing tool to form portions of semiconductor devices in or on the wafers;
- and
- modifying a processing speed associated with the first processing tool based on said at least one first work-in-process level.
An apparatus, comprising:
- means for determining at least one first work-in-process level associated with a first processing tool said at least one first work-in-process level indicating a rate at which wafers are being provided to or processed by the first processing tool to form portions of semiconductor devices in or on the wafers;
- and
- means for modifying a processing speed associated with the first processing tool based on said at least one first work-in-process level.
A semiconductor fabrication facility, comprising:
- a first processing tool;
- and
- a control unit configured to:
- determine at least one first work-in-process level associated with the first processing tool said at least one first work-process level indicating a rate at which wafers are being provided to or processed by the first processing tool to form portions of semiconductor devices in or on the wafers;
- and
- modify a processing speed associated with the first processing tool based on said at least one first work-in-process level.
3 more elements
Dependencies are inferred from the claim text.