Five axis compensated rotating stage
AssigneeXradia, Inc.
InventorYing Xu
Life of this patent
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Abstract
A rotating stage assembly performs high precision rotational angle and position error correction by continuous sensing and correcting motor stage assembly errors. It performs these corrections, to adjust for motor environmental and operational errors by sensing and correcting using five sensors placed to measure the adjustments of five corresponding actuators, which adjust the entire motor rotating stage and rotary motor assembly relative to a reference frame.
Claims15
A rotating stage assembly comprising;
- a reference frame,
- a rotation stage;
- a motor attached to the rotation stage and including a rotating spindle;
- a metrology disk connected to the rotating spindle;
- at least one sensor for detecting the position of the metrology disk relative to the reference frame;
- a sample stage connected to the rotating spindle for holding a sample;
- multiple actuators connected to the reference frame and positioning the rotation stage relative to the reference frame;
- and
- a controller for driving the multiple actuators in response to the sensors to control the position of the sample during the rotation of the sample by the motor.
A method for rotating and correcting position errors of a rotating sample stage assembly comprising:
- a metrology disk, a reference frame, actuators, which adjust a motor that rotates the sample and the metrology disk, and sensors that measure spacing between the reference frame and the metrology disk, the method comprising;
- rotating the metrology disk,
- reading form corrections for an angle of the metrology disk from a form corrections data file;
- applying the form corrections to the actuators;
- and
- reading sensors and adjusting the actuators.
A method for creating a form corrections data file to correct form errors of a rotating metrology disk in a rotating stage assembly comprising:
- a reference frame;
- actuators, which adjust a motor that rotates the metrology disk;
- and sensors that measure spacing between the reference frame and the metrology disk, the method comprising:
- rotating the metrology disk;
- reading the sensors and adjusting the actuators until position and angle errors of the metrology disk relative to the reference frame are minimized;
- reading a measurement from a reference sensor;
- calculating form corrections for the angle of the metrology disk, and writing the form corrections and rotation angle to a form corrections data file.
Dependencies are inferred from the claim text.