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AssigneeTosoh Corporation
InventorsKoyata Takahashi, Osamu Matsunaga, Michio Okamoto
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A component for a vacuum apparatus for use in a plasma processing apparatus or a film forming apparatus for a semiconductor or the like, in which a surface is covered with a ceramic and/or metallic thermal spray film and projection-shaped particles of a width of 10-300 μm, a height of 4-600 μm and an average height/width ratio of 0.4 or higher are present within a range of 20-20,000 particle/mm2 on the surface of the thermal spray film. The thermal spray film has a porosity of 10-40%, shows a high adhering property to a film-shaped substance, is free from a product contamination by particles generated by a peeling of the film-shaped substance and can be continuously used over a prolonged period.
A component for a vacuum apparatus comprising a ceramic and/or metallic thermal spray film formed on a base material, wherein projection-shaped particles of a width of 10-300 μm, a height of 4-600 μm and an average height/width ratio of 0.4 or higher are present within a range of 20-20,000 particle/mm2 on the surface of said thermal spray film, and the projection-shaped particles have a mountain-like shape and have rounded corners, in the case of the ceramic thermal spray film, the projection-shaped particle is formed by an agglomerate of particles of a diameter of 0.1-5 μm, and in the case of the metallic thermal spray film, the projection-shaped particle is formed by an agglomerate of particles of a diameter of 0.1-10 μm.
A sputtering target obtained by forming a ceramic and/or metallic thermal spray film on a non-erosion portion of a sputtering target material which is a component for a vacuum apparatus, wherein said thermal spray film containing projection-shaped particles of a width of 10-300 μm, a height of 4-600 μm and an average height/width ratio of 0.4 or higher within a range of 20-20,000 particle/mm2, and the projection-shaped particles have a mountain-like shape and have rounded corners, in the case of the ceramic thermal spray film, the projection-shaped particle is formed by an agglomerate of particles of a diameter of 0.1-5 μm, and in the case of the metallic thermal spray film, the projection-shaped particle is formed by an agglomerate of particles of a diameter of 0.1-10 μm.
Dependencies are inferred from the claim text.