Microreactor including magnetic barrier
OwnerRyoichi Aogaki, Eiko Ito +1inventors
InventorsRyoichi Aogaki, Eiko Ito, Mikio Ogata
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Abstract
Means for enabling plating on sites of complex configuration, etching for fine complex pattern, etc. through reduction of the viscosity resistance brought about by walls of fine liquid channel of microreactor. In particular, a microreactor comprising a liquid inlet, a fine liquid channel and a liquid discharge zone characterized in that the liquid channel is formed of a magnetic barrier of band ferromagnet so that a magnetic liquid introduced through the inlet undergoes at least one operation of chemical reaction, mixing, extraction and absorption in the liquid channel. Further, there is provided means for plating or etching performed by causing a plating solution or an etching solution to flow through the liquid channel.
Claims10
A microreactor, comprising:
- substrate;
- a ferromagnetic track arranged on or embedded inside the substrate;
- a liquid introduction zone,
- a microscopic liquid channel disposed on the substrate, the liquid channel being formed by a magnetic barrier which is generated by the ferromagnetic track and by applying a magnetic field, the liquid channel being adapted to pass a liquid having magnetism introduced from the introduction zone;
- a liquid discharge zone for discharging the liquid;
- and
- an apparatus for applying an external magnetic field to the ferromagnetic track or magnetism being maintained by the ferromagnetic track itself.
A microreactor, comprising:
- a liquid introduction zone;
- a microscopic liquid channel, said liquid channel being formed by a magnetic barrier created at least in part by operation of a ferromagnetic track, said liquid channel being operable for performing at least one of chemical reaction, mixing, extraction and absorption in the liquid channel, an outside of the liquid channel which is formed by the magnetic barrier being filled with surrounding fluid;
- and
- a liquid discharge zone.
A method of manufacturing a plated object, comprising:
- which comprises
- bringing into contact with a solid, an outside of a liquid channel formed by a magnetic barrier which is generated by a ferromagnetic track arranged on or embedded inside a substrate and by applying magnetic field;
- and
- plating a pattern along the liquid channel to the solid by a magnetic plating solution introduced from an introduction zone and flowing in the liquid channel.
A method of manufacturing a plated object, comprising:
- bringing into contact with a solid, an outside of a liquid channel formed by a magnetic barrier;
- and
- plating a pattern along the liquid channel to the solid by a magnetic plating solution flowing in the liquid channel, said plating including electroless plating and electroplating, said electroless plating and said electroplating includes filling the outside of a place flowing plating solution with surrounding liquid.
A method of manufacturing an etched object, comprising:
- bringing into contact with a solid, an outside of a liquid channel formed by a magnetic barrier which is generated by a ferromagnetic track arranged on or embedded inside a substrate and by applying magnetic field;
- and
- etching a pattern along the liquid channel to the solid by corrosive reaction or electrolysis of a magnetic liquid introduced from a liquid introduction zone and flowing in the liquid channel.
Dependencies are inferred from the claim text.