Method for fabricating structure of polymer-matrix conductive film
AssigneeIndustrial Technology Research Institute
InventorsRuoh Huey Uang, Yu Chih Chen, Ren Jen Lin, Syh Yuh Cheng
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Abstract
A composite conductive film formed of a polymer-matrix and a plurality of conductive lines less than micro-sized and its fabricating method are provided. The conductive lines are arranged parallel and spaced apart from each other so as to provide anisotropic conductivity. The present conductive film can serve as an electrical connection between a fine-pitch chip and a substrate. Additionally, an adhesive layer is formed on two opposite sides of the conductive film along its conductive direction to increase adhesive areas. The strength and reliability of the package using the conductive film are thus enhanced.
Claims23
A method for fabricating a polymer-matrix conductive film, comprising:
- providing a template, said template having a plurality of holes arranged parallel and spaced apart from each other and an electrode provided on one end of said holes;
- filling a first conductive material in said holes of said template over said electrode;
- filling a magnetic material in said holes on said first conductive material;
- removing said template to form a plurality of double-layered conductive lines arranged parallel and spaced apart from each other, said double-layered conductive lines comprising said first conductive material and said magnetic material;
- applying a magnetic field upon said double-layered conductive lines and filling a polymer material in spacings of said double-layered conductive lines;
- and
- removing said electrode, a portion of said polymer material and said magnetic material to form said polymer-matrix conductive film with a plurality of conductive lines arranged parallel and spaced apart from each other, said conductive lines comprising said first conductive material.
Dependencies are inferred from the claim text.