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US 7,521,846 B2Granted
Piezoelectric resonator element and piezoelectric device
AssigneeSeiko Epson Corporation
InventorHideo Tanaya
Life of this patent
Estimating the term…
Abstract
A piezoelectric resonator element including: a base formed of a piezoelectric material and having a given length; a plurality of vibration arms extending from one part of the base; and a supporting arm extending from another part of the base spaced apart from the one part of the base by the given length in a width direction, the supporting arm extending in a common direction with the vibration arms outboard the vibration arms.
Claims15
A piezoelectric resonator element, comprising:
- a base formed of a piezoelectric material;
- a plurality of vibration arms extending from a first part of the base and including a decreasing width extending from a junction of each vibration arm and the base towards a distal end of each vibration arm;
- a supporting arm extending from a second part of the base spaced apart from the first part of the base by a given length in a width direction, the supporting arm extending along the vibration arms outboard of the vibration arms;
- a long groove formed along a longitudinal direction of each of the vibration arms;
- and
- an electrode for driving formed in each of the long grooves.
3 more elements
A piezoelectric device, comprising:
- a piezoelectric resonator element housed in one of a package and a case, the piezoelectric resonator element including:
- a base formed of a piezoelectric material;
- a plurality of vibration arms extending from a first part of the base;
- a supporting arm extending from a second part of the base spaced apart from the first part of the base by a given length in a width direction, the supporting arm extending along the vibration arms outboard of the vibration arms;
- a long groove formed along a longitudinal direction of each of the vibration arms;
- an electrode for driving formed in the long groove;
- and
- a reduced width part that decreases the width of each of the vibration arms toward a distal end of the vibration arm.
5 more elements
A piezoelectric resonator element, comprising:
- a base formed of a piezoelectric material;
- a plurality of vibration arms extending from a first part of the base;
- a supporting arm extending from a second part of the base spaced apart from the first part of the base by a given length in a width direction, the supporting arm extending along the vibration arms outboard of the vibration arms and bonded to a package with a conductive adhesive;
- a long groove formed along a longitudinal direction of each of the vibration arms;
- an electrode for driving formed in the long groove;
- and
- a through hole formed in one of the supporting arm.
4 more elements
A piezoelectric resonator element, comprising:
- a base formed of a piezoelectric material;
- a plurality of vibration arms extending from a first part of the base;
- a supporting arm extending from a second part of the base spaced apart from the first part of the base by a given length in a width direction, the supporting arm extending along the vibration arms outboard of the vibration arms and bonded to a package with a conductive adhesive;
- a long groove formed along a longitudinal direction of each of the vibration arms;
- an electrode for driving formed in the long groove;
- and
- a cut part formed in a portion of the base by reducing a width of the piezoelectric material in a width direction of the base, the cut portion being closer to the vibration arms than a connecting part at which the supporting arm is connected to the base;
- wherein distance from a footing part of the vibration arm to the cut part exceeds a width of the distal end of the vibration arm.
5 more elements
Dependencies are inferred from the claim text.