Back to results
US 7,514,369 B2Granted
Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder
AssigneeApplied Nanotech Holdings, Inc.
InventorsYunjun Li, Igor Pavlovsky
Life of this patent
Estimating the term…
Abstract
The present invention is for a porous silicon powder comprising silicon particles wherein the outermost layers of said particles are porous. The present invention is also directed to a method of making this porous silicon powder using a stain etch method. The present invention is also directed to a method of making silicon nanoparticles from the porous silicon powders using a process of ultrasonic agitation. The present invention also includes methods of processing these silicon nanoparticles for use in a variety of applications.
Claims18
A method for making porous silicon powder comprising the steps of:
- a) providing a quantity of silicon powder comprising a plurality of silicon particles;
- and
- b) etching said silicon, particles using a stain-etch process to form porous silicon particles wherein only the outermost layers of said particles are porous, and wherein the outermost porous layers of said silicon particles comprise a thickness which ranges from at least about 1 angstrom to at most about 500 nanometers.
Dependencies are inferred from the claim text.