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US 7,511,169 B2Granted
Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsYouichi Ohsawa, Takeru Watanabe, Takeshi Kinsho, Katsuhiro Kobayashi
Life of this patent
Estimating the term…
Abstract
Sulfonate salts have the formula: CF3—CH(OCOR)—CF2SO3−M+ wherein R is C1-C20 alkyl or C6-C14 aryl, and M+ is a lithium, sodium, potassium, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.
Claims4
A sulfonate salt having the general formula (1):
- CF3—CH(OCOR)—CF2SO3−M+ (1)
- wherein R is a substituted or unsubstituted, straight, branched or cyclic C1 -C20 alkyl group or a substituted or unsubstituted C6-C14 aryl group, and M+ is a lithium, sodium, potassium, ammonium or tetramethylammonium ion.
A sulfonium salt having the general formula (2):
- R1R2R3S+CF3—CH(OCOR)—CF2SO3− (2)
- wherein R is a substituted or unsubstituted, straight, branched or cyclic C1-C20 alkyl group or a substituted or unsubstituted C6-C14 aryl group,
- R1, R2 and R3 are each independently selected from the class consisting of substituted or unsubstituted, straight or branched C1-C10 alkyl, alkenyl and oxoalkyl groups, and substituted or unsubstituted C6-C18 aryl, aralkyl and aryloxoalkyl groups, or any two or more of R1, R2 and R3 may bond together to form a ring with the sulfur atom.
A sulfonium salt having the general formula (2a):
- R′—(O)n-PhS30 Ph2CF3—CH(OCOR)—CF2SO3− (2a)
- wherein R is a substituted or unsubstituted, straight, branched or cyclic C1-C20 alkyl group or a substituted or unsubstituted C6-C14 aryl group,
- R′ is a substituted or unsubstituted, straight, branched or cyclic C1-C20 alkyl or alkenyl group or a substituted or unsubstituted C6-C14 aryl group,
- Ph is phenyl, and
- n is 0 or 1.
2 more elements
A iodonium salt having the general formula (2b):
- R′(O)n-PhI+Ph(O)n-R′CF3—CH(OCOR)—CF2SO3− (2b)
- wherein R is a substituted or unsubstituted, straight, branched or cyclic C1-C20 alkyl group or a substituted or unsubstituted C6-C14 aryl group,
- R′ is a substituted or unsubstituted, straight, branched or cyclic C1 -C20 alkyl or alkenyl group or a substituted or unsubstituted C6-C14 aryl group,
- Ph is phenyl, and
- n is 0 or 1.
2 more elements
Dependencies are inferred from the claim text.