Flux assisted solid phase epitaxy
AssigneeJapan Science and Technology Agency
InventorsHideomi Koinuma, Yuji Matsumoto, Ryota Takahashi
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AssigneeJapan Science and Technology Agency
InventorsHideomi Koinuma, Yuji Matsumoto, Ryota Takahashi
Estimating the term…
A flux assisted solid phase epitaxy that can make a thin film having a crystalline perfection comparable with that of a bulk crystal and at a reduced cost is provided in which an amorphous film of a mixture of an objective substance to be grown epitaxially and a flux of a substance producing a eutectic with the objective substance but not producing any compound therewith is deposited on a substrate at a temperature less than a eutectic point of the substances, and the substrate is heat-treated at a temperature not less than the eutectic point of the objective and flux substances. A solid phase reaction, namely solid phase diffusion causes the objective and flux substances to be mixed together to form a liquid phase in their eutectic state from which the objective substance precipitates and epitaxially grows on the substrate.
A flux assisted solid phase epitaxial growth method, characterized in that it comprises the steps of:
A flux assisted solid phase epitaxial growth method, characterized in that it comprises the steps of:
A flux assisted solid phase epitaxial growth method, characterized in that it comprises the steps of:
A flux assisted solid phase epitaxial growth method, characterized in that it comprises the steps of:
Dependencies are inferred from the claim text.