Method of micro-fabrication of a helical slow wave structure using photo-resist processes
AssigneeInnoSys, Inc.
InventorsLaurence P. Sadwick, Jehn-Huar Chern, Ruey-Jen Hwu, Jishi Ren, Ding Wu, Ching-Hsi Lin
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Abstract
Embodiments of the present invention include helical, ring bar and tunnel ladder slow wave structures (SWSs). Embodiments of methods of micro-fabricating such SWSs are also disclosed. Embodiments of high frequency electromagnetic devices including such SWSs are also disclosed. Exemplary high frequency electromagnetic devices may include a traveling wave tube, a traveling wave tube amplifier, a back wave oscillator, as part of a linear accelerator, a microwave power module, a klystron or a millimeter-wave power module.
Claims8
A method of micro-fabricating a helical slow wave structure, comprising:
- providing a hollow preform of a preselected material;
- coating the hollow preform with photoresist;
- winding a wire coil around the photoresist coated hollow preform;
- exposing the wire coil wound photoresist coated hollow preform to obtain a photoresist pattern;
- removing the wire coil;
- developing the photoresist pattern;
- removing exposed preform material according to the photoresist pattern;
- and
- stripping any remaining photoresist to obtain a helical slow wave structure.
Dependencies are inferred from the claim text.