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US 7,501,051 B2Granted
Electropolishing electrolyte and method for planarizing a metal layer using the same
AssigneeBASF SE
InventorsJia Min Shieh, Sue Hong Liu, Bau Tong Dai
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AssigneeBASF SE
InventorsJia Min Shieh, Sue Hong Liu, Bau Tong Dai
Estimating the term…
The present electropolishing electrolyte comprises an acid solution and an alcohol additive having at least one hydroxy group, wherein the contact angle of the alcohol additive is smaller than the contact angle of the acid solution on a metal layer under electropolishing. The alcohol additive is selected methanol, ethanol and glycerol, and the acid solution comprises phosphoric acid. The volumetric ratio of glycerol to phosphoric acid is between 1:50 and 1:200, and is preferably 1:100. The volumetric ratio is between 1:100 and 1:150 for methanol to phosphoric acid, and between 1:100 and 1:150 for ethanol to phosphoric acid. In addition, the acid solution further comprises an organic acid selected from the group consisting of acetic acid and citric acid. The concentration is between 10000 and 12000 ppm for the acetic acid, and between 500 and 1000 ppm for citric acid.
An electropolishing electrolyte comprising an acid solution and an alcohol additive, wherein the contact angle of the alcohol additive on a metal layer under electropolishing is smaller than the contact angle of the acid solution, wherein the acid solution comprises phosphoric acid and an organic acid selected from the group consisting of acetic acid and citric acid;
A method for planarizing a metal layer, the metal layer having at least one concave and one convex, characterized in using an alcohol additive to form an inhibition layer on the metal layer to reduce the polishing rate on the surface of the metal layer and using an acid solution to polish the metal layer, wherein the acid solution forms a concentration gradient between the concave and the convex so that the polishing rate is faster on the convex than the polishing rate on the concave, wherein the acid solution comprises phosphoric acid and an organic acid selected from the group consisting of acetic acid and citric acid, the alcohol additive is selected from the group consisting of methanol, ethanol and glycerol, and the volumetric ratio of the alcohol additive to the acid solution is between 1:50 and 1:200.
Dependencies are inferred from the claim text.