Rectangular parallelepiped fluid storage and dispending vessel
AssigneeAdvanced Technology Materials, Inc.
InventorsDennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers
Life of this patent
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Abstract
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Claims35
A fluid storage and dispensing vessel having an interior volume, a port for dispensing fluid from said interior volume and a valve connected to said port, wherein the fluid storage and dispensing vessel is of rectangular parallelepiped form, said vessel containing monolithic form physical adsorbent defining a cavity therein, and including a valve assembly comprising said valve, wherein the valve assembly includes a downwardly extending portion received in a cavity in the monolithic physical adsorbent.
A method of fabricating a gas source package, said method comprising:
- processing a metal workpiece by a drawing process to form a seamless tube closed at a first end thereof and open at a second end thereof, said tube defining an interior volume therein;
- introducing into said interior volume at least one block of physical adsorbent material;
- after introduction of said at least one block of physical adsorbent material into the interior volume of said tube, welding a top plate member to the second end of the tube to enclose the interior volume;
- and
- securing a fluid dispensing assembly to the top plate member.
A fluid storage and dispensing vessel comprising:
- at least one vessel wall defining an interior volume;
- a port for dispensing fluid from said interior volume;
- a monolithic form physical adsorbent disposed within the interior volume and defining a cavity in the monolithic form physical adsorbent;
- and
- a valve assembly connected to said port, wherein the valve assembly includes a downwardly extending portion received in the cavity.
Dependencies are inferred from the claim text.