Optically coupled resonant pressure sensor and process
OwnerDavid W. Burnsinventor
Life of this patent
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Abstract
A process for fabricating an optically coupled resonant pressure sensor includes the steps of forming a sensor die including at least one optically coupled resonator from a first semiconductor substrate and forming a cap die including a fiber hole from a second semiconductor substrate. The sensor die and the cap die are aligned and bonded to form a resonant pressure sensor capsule. The fiber hole in the cap die is aligned with at least one resonator on the sensor die. Also disclosed is an optically coupled resonant pressure sensor formed from steps thereof.
Claims25
An optically coupled resonant pressure sensor comprising:
- a sensor die including a pressure-sensitive deformable diaphragm and at least one optically coupled resonator;
- and
- a cap die including a fiber hole and a cap recess;
- wherein the sensor die and the cap die are bonded to form a resonant pressure sensor capsule, and wherein the fiber hole in the cap die is aligned with at least one resonator on the sensor die.
An optically coupled resonant pressure sensor comprising:
- a sensor die including a pressure-sensitive deformable diaphragm and at least one optically coupled resonator;
- and
- a transparent cap die including a cap recess;
- wherein the sensor die and the cap die are bonded to form a resonant pressure sensor capsule.
An optically coupled resonant pressure sensor comprising:
- a sensor die including a pressure-sensitive deformable diaphragm and at least one optically coupled resonator;
- a transparent cap die including a cap recess;
- and
- a spacer including a spacer hole positioned between the sensor die and the cap die;
- wherein the sensor die, the cap die, and the spacer die are bonded to form a resonant pressure sensor capsule.
Dependencies are inferred from the claim text.