System and method for controlled mixing of fluids via temperature
AssigneeEntegris, Inc.
InventorsJ. Karl Niermeyer, Robert F. McLoughlin, Joseph E. Smith
Life of this patent
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Abstract
Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.
Claims19
A fluid mixing system comprising:
- a first flow controller to control the flow of a first fluid;
- a second flow controller to control the flow a second fluid;
- a first mixer in fluid communication with and downstream of the first flow controller and second flow controller to mix the first and second fluid to produce a first mixed fluid;
- a first temperature sensor downstream of the first mixer to measure the temperature of the first mixed fluid;
- a second mixer downstream of the first mixer;
- and
- a third flow controller to regulate the flow of a third fluid, wherein the third fluid is added to the first mixed fluid to create a second mixed fluid;
- wherein the first flow controller is configured to regulate the flow of the first fluid using a first fluid target flow rate;
- and
- the second flow controller is configured to regulate the flow of the second fluid based on a temperature setpoint and temperature of the first mixed fluid.
A fluid mixing system comprising:
- a hot fluid flow controller to control the flow of a hot fluid;
- a cold fluid flow controller to control the flow of a cold fluid;
- a first static mixer downstream of the first hot fluid flow controller and the cold fluid flow controller to receive the hot fluid, receive the cold fluid and mix the hot and cold fluids to create a mixed fluid;
- a mixed fluid temperature sensor to determine the temperature of the mixed fluid;
- a chemical flow controller to control the flow of a chemical;
- a second static mixer downstream of the chemical flow controller and the first static mixer to receive the mixed fluid, receive the chemical and mix the mixed fluid and the chemical to create a dilute chemical;
- and
- a chemical temperature sensor to measure the temperature of the dilute chemical;
- wherein the cold fluid flow controller:
- controls the flow of the cold fluid based on a cold fluid target flow rate;
- communicates a temperature setpoint to the hot fluid flow controller;
- the hot fluid flow controller regulates the flow rate of the hot fluid based on the temperature setpoint and temperature of the mixed fluid;
- and
- the chemical flow controller controls the flow of the chemical based on a target chemical flow rate.
Dependencies are inferred from the claim text.