Dense coating formation by reactive deposition
AssigneeNanoGram Corporation
InventorsShivkumar Chiruvolu, Michael Edward Chapin
Life of this patent
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Abstract
Methods for forming coated substrates can be based on depositing material from a flow onto a substrate in which the coating material is formed by a reaction within the flow. In some embodiments, the product materials are formed in a reaction driven by photon energy absorbed from a radiation beam. In additional or alternative embodiments, the flow with the product stream is directed at the substrate. The substrate may be moved relative to the flow. Coating materials can be formed with densities of 65 percent to 95 percent of the fully densified coating material with a very high level of coating uniformity.
Claims24
A method for coating a substrate, the method comprising:
- reacting a flowing reactant stream initiated as a flow from a reactant nozzle by directing a radiation beam at the reactant stream to produce a product stream downstream from the radiation beam, wherein the reaction is driven by photon energy from the radiation beam wherein the reactant stream comprises a metal species or a metalloid species, wherein the radiation beam is directed to pass adjacent the substrate and wherein a concentration of product is selected to be sufficiently low to result in the deposition of coating compositions that have not coalesced into stable particulates to form a selected coating density;
- and
- directing the product stream at a substrate selectively positioned in the flow to coat the substrate with a coating material from the product stream at a density of at least about 65 percent of the density of the fully densifled coating material wherein the depositing of the coating material comprises moving the substrate relative to the flow of the product stream.
A method for coating a substrate, the method comprising:
- depositing a non-porous coating by directing flow of a product stream to a suitably positioned substrate to deposit the coating on the substrate, wherein the product stream is formed by reacting within the flow a reactant stream that comprises a metal species or metalloid species to form the product stream, with the reactant stream being initiated from a reactant nozzle, the reaction being driven with photon energy absorbed from a radiation beam that is configured to pass adjacent the substrate, wherein the product stream is formed downstream from the radiation beam with the flow passing through the radiation beam, wherein the depositing of the coating material comprises moving the substrate relative to the flow of the product stream and wherein a concentration of product is selected to be sufficiently low to result in the deposition of coating compositions that have not coalesced into stable particulate to form a selected coating density.
A method for coating a substrate, the method comprising:
- depositing a coating material to form a coating having a density of at least about 65 percent of the density of the fully densified coating material, wherein the coating is deposited from a product composition in a reactor, wherein product composition is within a product stream that is formed by reacting a reactant stream that comprises a metal species or metalloid species, with the reactant stream being initiated from a reactant nozzle, in which the reaction is driven with photon energy absorbed from a radiation beam that is configured to pass adjacent the substrate, wherein the product stream is formed downstream from the radiation beam with the flow passing through the radiation beam, wherein the depositing of the coating comprises moving the product stream relative to the substrate, wherein the depositing of the coating material comprises moving the substrate relative to the flow of the product stream and wherein a concentration of product is selected to be sufficiently low to result in the deposition of coating compositions that have not coalesced into stable particulates to form a selected coating density.
Dependencies are inferred from the claim text.