Magnetostrictive multilayer sensor and method for producing a sensor
AssigneeInfineon Technologies AG
InventorsManfred Ruehrig, Stephan Schmitt, Juergen Zimmer
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AssigneeInfineon Technologies AG
InventorsManfred Ruehrig, Stephan Schmitt, Juergen Zimmer
Estimating the term…
A sensor has a substrate in which a mechanically deformable area is formed. A first magnetostrictive multilayer sensor element and a second magnetostrictive multilayer sensor element are formed in the mechanically deformable area, wherein the first magnetostrictive multilayer sensor element and the second magnetostrictive multilayer sensor element are connected to each other and implemented such that when generating a mechanical deformation of the mechanically deformable area, the electric resistance of the first magnetostrictive multilayer sensor element changes in an opposite way to the electric resistance of the second magnetostrictive multilayer sensor element, or the electric resistance of the first magnetostrictive multilayer sensor element remains unchanged.
A sensor, comprising:
A method for producing a sensor, comprising:
Dependencies are inferred from the claim text.