Method for controlling/regulating a physical quantity of a dynamic system, in particular a micromechanical sensor

A device for controlling/regulating a physical variable of a physical system, in particular of a dynamic system, to a specific desired value/desired value profile, which device features a pulse modulator by means of which a sequence of discrete modulation signals can be generated, wherein said signals effect the control/regulation of the physical variable, characterized by a) a comparison unit by means of which it is possible to determine an exact value or an approximation for the deviation between the momentary desired value and the momentary actual value of the physical variable,

• b) a calculation unit which is connected to the comparison unit and by means of which it is possible to calculate the relevant changes in the deviation, as determined by the comparison unit, which would result from the maintenance of the momentary modulation signal or the switching over to the other modulation signals,
• c) a decision unit which is connected to the calculation unit and, depending on the deviation changes calculated by the comparison unit, decides which modulation signal results in the best approximation of the momentary desired value, wherein the modulation signal sequence which is generated by the pulse modulator can be controlled by the decision unit.

An entity for simultaneously controlling/regulating at least two physical variables of a physical system, in particular a dynamic system, to specific desired values/desired value profiles, said entity featuring a pulse modulator by means of which it is possible to generate a sequence of discrete modulation signals that effect the control/regulation of the physical variables, characterized by

• a calculation unit which, for each generatable modulation signal, calculates an effective total deviation which is derived from the sum of the exact values or the approximations for the deviations between the momentary desired values and corresponding actual values of the physical variables, which would result from the maintenance of this modulation signal or the switching over to this modulation signal,
• a decision unit which is connected to the calculation unit and, depending on the effective total deviations calculated by the calculation unit, decides for which modulation signal the calculated effective total deviation would be smallest, wherein the modulation signal sequence which is generated by the pulse modulator is controlled by the decision unit.