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US 7,489,433 B2Granted
Method and apparatus for making and using 1D and 2D magnetic actuators
AssigneeMicrovision, Inc.
InventorsHakan Urey, Olgac Ergeneman
Life of this patent
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Abstract
A light beam scanner may include a polymeric material and a soft magnetic material.
Claims3
A light beam scanner comprising:
- a mounting structure;
- an epoxy-fiberglass substrate coupled to the mounting structure and configured to oscillate in a bending motion around at least one axis of rotation;
- a first magnetic actuator portion coupled to the mounting structure;
- and
- a second magnetic actuator portion coupled to the epoxy-fiberglass substrate wherein the first and second magnetic actuator portions are operable to cooperate to actuate oscillation of the epoxy-fiberglass substrate;
- wherein the first magnetic actuator portion comprises a coil structure and the second magnetic actuator portion comprises a magnet comprising a soft magnetic material;
- and
- further comprising a copper layer coupled to the epoxy-fiberglass substrate and wherein the soft magnetic material comprises a material electroplated onto the copper layer.
5 more elements
Dependencies are inferred from the claim text.