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US 7,489,071 B2Granted
Field emission system and method for improving its vacuum
AssigneeIndustrial Technology Research Institute
InventorsYu-Han Chien, Chih-Ping Peng, Chuan-Hsu Fu, Wei-Yi Lin, Lih-Hsiung Chan
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Abstract
The present invention provides a field emission system and a method for improving its vacuum. The present invention employs aging surface-unsaturated carbon nanotubes in non-display areas of the field emission system as getter material to absorb residual gas within the system so as to improve its vacuum. The present method for improving vacuum of the field emission system can be integrated with the standard process of a field emission display device without additional fabricating steps, and thus facilitating the mass production of the field emission display device.
Claims23
A field emission system, comprising:
- an upper substrate;
- a lower substrate disposed under said upper substrate and a field emission area and a getter area defined therebetween;
- an anode array formed on an inner surface of said upper substrate corresponding to said field emission area and including at least one first anode wire;
- a phosphor layer formed under said anode array;
- a cathode array formed on an inner surface of said lower substrate corresponding to said anode array and including at least one first cathode wire;
- a carbon nanotube (CNT) field emission array including a plurality of CNT units formed on said at least one first cathode wire and each of said CNT units including a plurality of carbon nanotubes;
- at least one second anode wire formed on said inner surface of said upper substrate corresponding to said getter area;
- at least one second cathode wire formed on said inner surface of said lower substrate corresponding to said second anode wire;
- and
- a plurality of surface-unsaturated carbon nanotubes formed on said second cathode wire.
7 more elements
A field emission system, comprising:
- an upper substrate;
- a lower substrate disposed under said upper substrate and a field emission area and a getter area defined therebetween;
- an anode array formed on an inner surface of said upper substrate corresponding to said field emission area and including at least one first anode wire;
- a phosphor layer formed under said anode array;
- a cathode array formed on an inner surface of said lower substrate corresponding to said anode array and including at least one first cathode wire;
- a CNT field emission array including a plurality of CNT units formed on said at least one first cathode wire and each of said CNT units including a plurality of carbon nanotubes;
- at least one second anode wire formed on said inner surface of said upper substrate corresponding to said getter area;
- at least one second cathode wire formed on said inner surface of said lower substrate corresponding to said second anode wire;
- and
- a plurality of surface-unsaturated carbon nanotubes formed on said second anode wire.
7 more elements
A field emission system, comprising:
- an upper substrate;
- a lower substrate disposed under said upper substrate and a field emission area and a getter area defined therebetween;
- an anode array formed on an inner surface of said upper substrate corresponding to said field emission area and including at least one first anode wire;
- a phosphor layer formed under said anode array;
- a cathode array formed on an inner surface of said lower substrate corresponding to said anode array and including at least one first cathode wire;
- a dielectric layer formed on said cathode array and having a plurality of holes formed therein for exposing partial portions of said cathode wires;
- a plurality of carbon nanotube units formed on said partial portions of said cathode wires within said holes;
- a plurality of gate electrodes formed on said dielectric layer respectively corresponding to said holes;
- at least one second anode wire formed on said inner surface of said upper substrate corresponding to said getter area;
- at least one second cathode wire formed on said inner surface of said lower substrate corresponding to said second anode wire;
- and
- a plurality of surface-unsaturated carbon nanotubes formed on said second cathode wire.
9 more elements
A field emission system, comprising:
- an upper substrate;
- a lower substrate disposed under said upper substrate and a field emission area and a getter area defined therebetween;
- an anode array formed on an inner surface of said upper substrate corresponding to said field emission area and including at least one first anode wire;
- a phosphor layer formed under said anode array;
- a cathode array formed on an inner surface of said lower substrate corresponding to said anode array and including at least one first cathode wire;
- a dielectric layer formed on said cathode array and having a plurality of holes formed therein for exposing partial portions of said cathode wires;
- a plurality of carbon nanotube units formed on said partial portions of said cathode wires within said holes;
- a plurality of gate electrodes formed on said dielectric layer respectively corresponding to said holes;
- at least one second anode wire formed on said inner surface of said upper substrate corresponding to said getter area;
- at least one second cathode wire formed on said inner surface of said lower substrate corresponding to said second anode wire;
- and
- a plurality of surface-unsaturated carbon nanotubes formed on said second anode wire.
9 more elements
A method for improving vacuum level of a vacuum system, by which aging surface-unsaturated carbon nanotubes are provided in said system as getter material to improve vacuum of said system.
Dependencies are inferred from the claim text.