US 7,480,540 B2Granted

Method for producing microstructures

AssigneeSchott AG

InventorHeinrich Ostendarp

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Abstract

The invention discloses a device and a method for producing microstructures with a spindle, which is adapted to be driven for rotation about its longitudinal axis and which is provided with a fixture for clamping a workpiece, having an actuator provided with a fast drive, in particular a piezo drive, adapted to produce fast movement of a tool in a direction substantially perpendicular to the workpiece surface, which actuator can be positioned along a workpiece surface to be worked with the aid of an additional drive adapted to produce a linear feed motion in a first direction, the fast drive being coupled with the tool via guide means that allow feeding of the tool in axial direction of the fast drive, against the action of a restoring force, and that is highly rigid in a plane perpendicular to that direction. The control technology used permits microstructures to be produced precisely and reproducibly utilizing the dynamic properties of the system.

Claims20

Dependent claims

A method of producing a microstructured surface on a workpiece rotated by a spindle, using a tool driven by an actuator that can be moved in a direction toward the workpiece surface by the actuator and that can be linearly positioned, in a direction perpendicular thereto, along the workpiece surface by a linear drive, the method comprising the following steps:

(a) providing a desired microstructure for a workpiece to be worked;
(b) transforming the desired microstructure to a file look-up table LUT containing an actuation position in a perpendicular working direction as a function of an angle of rotation of the workpiece and a linear feed travel of the tool along the workpiece surface, for an actuator-controlled feed motion of the tool;
(c) performing a spatial frequency analysis of the desired microstructure, and determining a maximum cut-off frequency of a signal for the feed position as a function of the angle of rotation, the linear feed motion of the actuator along the workpiece surface and of the cutting speed;
(d) setting cutting speed for the turning operation of the workpiece so that the maximum cut-off frequency of the desired microstructure is lower than the first resonant frequency of the actuator;
(e) driving the spindle and said linear drive and producing a microstructure on the workpiece by feeding the tool against the workpiece surface by means of the actuator controlled by actuation values derived from the look-up table as a function of the cutting speed, the angle of rotation and the length of the feed motion of the actuator along the workpiece surface.

2 more elements

A method of producing microstructures, comprising the steps of

providing a spindle which can be rotated about a longitudinal axis thereof;
providing a fixture provided on said spindle for clamping a workpiece;
providing a linear drive adapted to produce a linear feed motion in a first direction;
providing an actuator arranged on said linear drive;
providing a desired microstructure for a workpiece to be worked;
transforming the desired microstructure to a file look-up table LUT containing an actuation position in a perpendicular working direction as a function of an angle of rotation of the workpiece and a linear feed travel of the tool along the workpiece surface, for an actuator-controlled feed motion of the tool;
performing a spatial frequency analysis of the desired microstructure, and determining a maximum cut-off frequency of a signal for the feed position as a function of the angle of rotation, the linear feed motion of the actuator along the workpiece surface and of the cutting speed;
setting cutting speed for the turning operation of the workpiece so that the maximum cut-off frequency of the desired microstructure is lower than the first resonant frequency of the actuator;
driving the spindle and said linear drive and producing a microstructure on the workpiece by feeding the tool against the workpiece surface by means of the actuator controlled by actuation values derived from the look-up table as a function of the cutting speed, the angle of rotation and the length of the feed motion of the actuator along the workpiece surface.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 11/584,390Filed 20 Oct 2006 · continuation
Priority: DE 10 2004 020 99023 Apr 2004
Published: US 2007/0101836 A110 May 2007
Granted: 20 Jan 2009
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

B23Q 5/027
Driving main working members: reciprocating members
B23Q 1/34
Characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of…:…
B23Q 1/36
Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements: springs
G05B 2219/41344
Servomotor, servo controller till figures: piezo, electrostrictive linear drive