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US 7,480,323 B2Granted
Laser tube with external adjustable reactance for a gas discharge RF-excited laser
AssigneeSynrad, Inc.
InventorMichael W. Murray
Life of this patent
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Abstract
A laser device is provided. The laser device includes a laser tube, oscillator circuitry, and a compensating reactive component that is arranged in parallel with the laser tube.
Claims20
A device for an RF-excited gas laser, comprising:
- a laser tube, including:
- a discharge region;
- a first electrode;
- a second electrode, wherein the first and second electrodes are disposed on opposite sides of the discharge region, the first electrode is coupled to a first node, and
- wherein the second electrode is coupled to a second node;
- and
- an inductive coil that is coupled between the first node and the second node;
- a reactive component that is external to the laser tube, wherein the reactive component is coupled between the first node and the second node;
- and
- oscillator circuitry that is coupled to the first electrode, wherein the oscillator circuitry is arranged to provide radio-frequency (RF) power to at least the first electrode.
7 more elements
A device for an RF-excited gas laser, comprising:
- a laser tube, including:
- a discharge region;
- a first electrode;
- a second electrode, wherein the first and second electrodes are disposed on opposite sides of the discharge region, and wherein the first electrode is coupled to a first node, the second electrode is coupled to a second node;
- a first tap that is coupled to the first node;
- a second tap that is coupled to the second node;
- and
- a plurality of inductive coils that are coupled between the first node and the second node;
- a reactive component that is external to the laser tube, wherein the reactive component is coupled between the first tap and the second tap;
- oscillator circuitry that is coupled to the first electrode, wherein the oscillator circuit is coupled to the first tap and the second tap, and wherein the oscillator circuitry is arranged to provide radio-frequency (RF) power to at least the first electrode.
7 more elements
A method for laser generation, comprising:
- generating a laser by providing RF power to a gas laser tube, wherein the gas laser tube includes a discharge region and a plurality of coils in parallel with the discharge region;
- and
- while the laser is being generated, at an operating frequency of the laser, adjusting a reactance of a reactive component that is external to the laser tube and that is in parallel with the discharge region of the laser tube.
Dependencies are inferred from the claim text.