Interferometric device
AssigneeUniversitaet Zu Luebeck
InventorsPeter Koch, Edmund Koch
Life of this patent
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Abstract
Device for white light interferometry comprising a light source of main emission wavelength λ0 and spectral width Δλ and an evaluating unit with a line sensor of pixel width P for detecting an interference fringe pattern with a fringe spacing F, a mask being placed in front of the line sensor having a periodically modulated light transmittance along said line sensor, characterized in that the period length M of the mask is such as to fulfill the condition Δ λ λ 0 < 1 - F M < 1 2 F P - Δ λ λ 0 .
Claims8
A device for white light interferometry comprising a light source of main emission wavelength λ0 and spectral width Δλ and an evaluating unit with a line sensor of pixel width P for detecting an interference fringe pattern with a fringe spacing F, a mask being placed in front of the line sensor having a periodically modulated light transmittance along said line sensor, wherein the period length M of the mask is such as to fulfill the condition
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Dependencies are inferred from the claim text.