Position detection based on two-directional correlation
AssigneeAgilent Technologies, Inc.
InventorsStefan Falk-Jordan, Bernd Nawracala, Hans-Peter Zimmermann
Life of this patent
Estimating the term…
Abstract
A method of determining position information, the method having detecting—along a first direction—a value of a geometry parameter related to a structure formed on and/or in a substrate, and determining—with regard to a second direction—a value of a position parameter based on the detected value of the geometry parameter and a predetermined relationship between the geometry parameter and the position parameter.
Claims9
A method of determining the position of an apparatus with respect to a fluidic flow path on a surface of a fluidic product, the method comprising
- including at least one auxiliary structure, that is not a fluidic flow path, on the surface so that the auxiliary structure has a known spatial relationship with respect to the fluidic flow path;
- obtaining a measure involving the auxiliary structure along a first direction on the surface using the apparatus;
- and
- obtaining the position of the apparatus with respect to the fluidic flow path along a second direction on the surface based on the measure obtained.
An apparatus for determining its position of with respect to a fluidic flow path on a surface of a fluidic product, the fluidic product further including at least one auxiliary structure, that is not a fluidic flow path, on the surface, the auxiliary structure having a known spatial relationship with the fluidic flow path, the apparatus comprising
- a detecting unit configured for obtaining a measure involving the auxiliary structure along a first direction on the surface;
- a determining unit configured for obtaining the position of the apparatus with respect to the fluidic flow path along a second direction on the surface based on the measure obtained with the detecting unit.
Dependencies are inferred from the claim text.