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US 7,480,039 B2Granted
Multi mode inspection method and apparatus
AssigneeNegevtech Ltd.
InventorsDov Furman, Noam Dotan, Efraim Miklatzky
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Abstract
An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, alone an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
Claims12
An inspection system for inspecting an object, the system comprising:
- an illuminator including at least one pulsed light source, said illuminator being operative to selectively provide at least one mode of illumination according to an illumination schedule;
- a detector assembly comprising a plurality (n) of 2-dimensional detectors disposed so that on an image plane of said object, said plurality of 2-dimensional detectors are arranged at intervals, and said plurality (n) of 2-dimensional detectors in said detector assembly are arranged in a plurality of columns, such that the layout of at least one of said plurality of columns is different from the layout of at least one other of said plurality of columns;
- and
- a relative motion provider operative to provide motion of the object relative to the detector assembly, along an axis of motion according to a motion schedule,
- wherein said motion schedule and said illumination schedule are selected to provide images of at least part of said object in said at least one mode of illumination and wherein each of said plurality (n) of 2-dimensional detectors provides a 2-dimensional output.
2 more elements
An inspection system for inspecting an object, the system comprising:
- an illuminator including at least one pulsed light source, said illuminator being operative to selectively provide at least one mode of illumination;
- a detector assembly comprising a plurality (n) of 2-dimensional detectors disposed so that on an image plane of said object, said plurality of 2-dimensional detectors are arranged at intervals, and said plurality (n) of 2-dimensional detectors in said detector assembly are arranged in a plurality of columns, such that the layout of at least one of said plurality of columns is different from the layout of at least one other of said plurality of columns;
- and
- a relative motion provider operative to provide motion of the object relative to said detector assembly, along an axis of motion,
- wherein at least two of said plurality (n) of 2-dimensional detectors are at essentially the same position parallel to a direction of motion of said object relative to said detector assembly.
2 more elements
A method for inspecting an object, the method comprising:
- operating an illuminator, including at least one pulsed light source, and being operative to selectively provide a plurality of modes of illumination according to an illumination schedule;
- operating a detector assembly comprising a plurality of 2-dimensional detectors;
- and
- providing motion of the object relative to said detector assembly, along an axis of motion, in accordance with a motion schedule,
- wherein said motion schedule and said illumination schedule are selected to provide images of at least part of said object in at least two of said plurality of modes of illumination thereby inspecting said object,
- wherein each of said plurality (n) of 2-dimensional detectors provides a 2-dimensional output,
- and wherein said plurality of 2-dimensional detectors are arranged at intervals, and said plurality (n) of 2-dimensional detectors in said detector assembly are arranged in a plurality of columns, such that the layout of at least one of said plurality of columns is different from the layout of at least one other of said plurality of columns.
4 more elements
Dependencies are inferred from the claim text.