Piezoelectric component and method for producing it
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsRobert Aigner, Stephan Marksteiner, Winfried Nessler
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Abstract
A piezoelectric component comprises at least two stacked crystal filters on a substrate. Each stacked crystal filter comprises a bottom electrode, a first piezoelectric layer arranged above the bottom electrode, a central electrode arranged above the first piezoelectric layer, a second piezoelectric layer arranged above the central electrode, and a top electrode arranged above the second piezoelectric layer. The bottom electrodes are directly connected to one another and the central electrodes are directly connected to one another.
Claims20
A piezoelectric component comprising at least two stacked crystal filters on a substrate, each stacked crystal filter comprising a bottom electrode, a first piezoelectric layer arranged above the bottom electrode, a central electrode arranged above the first piezoelectric layer, a second piezoelectric layer arranged above the central electrode, and a top electrode arranged above the second piezoelectric layer, wherein the bottom electrodes are directly connected to one another and the central electrodes are directly connected to one another, and wherein at least one of the stacked crystal filters has at least one contact hole extending through the top electrode and the upper piezoelectric layer and via which the central electrode can be connected to a predetermined potential by means of at least one electrically conductive material.
Dependencies are inferred from the claim text.