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US 7,479,795 B2Granted
Temperature control apparatus
AssigneeDaytona Control Co., Ltd.
InventorsShintaro Hayashi, Osamu Urakawa, Mitsuo Koizumi
Life of this patent
Estimating the term…
Abstract
A temperature control apparatus includes a socket holder which is provided on a tester head and holds a socket to mount an IC chip. A socket cover has an opening to pass the end of a handler pusher for holding the IC chip on testing. The socket cover forms a closed space around the IC chip in a state that the IC chip is pressed to the socket by the pusher. A gas supplying unit externally supplies the closed space with gas of a predetermined temperature.
Claims13
A temperature control apparatus comprising:
- a socket holder which is provided on a tester head and holds a socket to mount a test object IC chip, the socket holder including a substantially square space formed therein around the IC chip held on the socket and at least two gas grooves formed at two opposed corners along a diagonal line of the square space;
- a socket cover mounted on the socket holder and having an opening to pass the end of a handler pusher for holding the IC chip on the socket on testing, to close the space formed around the IC chip in a state that the IC chip is pressed to the socket by the pusher;
- and
- a gas supplying unit which externally supplies the space with gas of a predetermined temperature through the two gas grooves.
1 more element
A temperature control apparatus comprising:
- a socket holder which is provided on a tester head and holds a socket to mount a test object IC chip, the socket holder including a substantially square space formed therein around the IC chip held on the socket and four gas grooves formed at four corners of the space, two of the four gas grooves formed at two opposed corners along a diagonal line of the square space being connected to a gas supplying unit, and the other two of the four grooves acting as exhaust paths;
- a socket cover mounted on the socket holder and having an opening to pass the end of a handler pusher for holding the IC chip on the socket on testing, to close the space formed around the IC chip in a state that the IC chip is pressed to the socket by the pusher;
- and wherein the gas supplying unit externally supplies the space with gas of a predetermined temperature through the two gas grooves not acting as exhaust paths.
A temperature control apparatus comprising:
- a socket holder which is provided on a tester head and holds a socket to mount a test object IC chip, the socket holder including a substantially square space formed therein around the IC chip held on the socket and four gas grooves formed at four corers of the space, two of the four gas grooves formed at two opposed corners along a diagonal line of the square space being connected to a gas supplying unit, and the other two of the four gas grooves acting as exhaust oaths;
- a socket cover mounted on the socket holder and having an opening to pass the end of a handler pusher for holding the IC chip on the socket on testing, to close the space formed around the IC chip in a state that the IC chip is pressed to the socket by the pusher;
- wherein the gas supplying unit externally supplies the closed space with gas of a predetermined temperature;
- and a pusher end portion which is mounted to an end of the pusher and has a gas groove through which the gas from the gas supplying unit passes;
- and a suction hole which absorbs the IC chip.
2 more elements
Dependencies are inferred from the claim text.