MEMS device using an actuator
AssigneeKabushiki Kaisha Toshiba
InventorTatsuya Ohguro
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Abstract
A MEMS includes an actuator, first and second electrodes, and a fixed shaft. The actuator is provided above a substrate. The actuator has one end and the other end. The one end of the actuator is coupled relative to the substrate. The first electrode is arranged at a position facing the second electrode. The second electrode has one end and the other end. The one end of the second electrode is coupled to the other end of the actuator. The other end of the second electrode is a free end. The fixed shaft is connected to the second electrode between the one end thereof and the other end thereof. The first electrode faces the second electrode at a portion between the fixed shaft and the other end of the second electrode.
Claims20
A Micro-electro-mechanical system (MEMS) comprising:
- an actuator provided above a substrate, and having a movable part;
- and
- a first electrode formed on the substrate;
- and
- a second electrode coupled to the movable part of the actuator, and configured to be displaced by the actuator, the second electrode being arranged at a position facing the first electrode, and having a fixed shaft between the movable part of the actuator and the first electrode, the fixed shaft being coupled relative to the substrate,
- wherein a portion in the vicinity of the fixed shaft in the second electrode between the movable part and the fixed shaft displaces in a first direction, and a portion in the vicinity of the fixed shaft in the second electrode on the side of the first electrode from the fixed shaft displaces in a second direction opposite to the first direction.
A Micro-electro-mechanical system (MEMS) comprising:
- an actuator provided above a substrate, the actuator having one end and the other end, said one end of the actuator being coupled relative to the substrate;
- first and second electrodes, the first electrode being arranged at a position facing the second electrode, the second electrode having one end and the other end, said one end of the second electrode being coupled to said other end of the actuator, said other end of the second electrode being a free end;
- and
- a fixed shaft connected to the second electrode between said one end thereof and said other end thereof,
- wherein the first electrode faces the second electrode at a portion between the fixed shaft and said other end of the second electrode.
Dependencies are inferred from the claim text.