Electronic device on substrate with cavity and mitigated parasitic leakage path
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorsR. Shane Fazzio, Richard C. Ruby, Christopher P. Wade, Michael Louis Frank, David A. Feld
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Abstract
An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface of the substrate; and the first electrode is electrically coupled to the substrate. The coating layer coats at least part of a substrate surface in the cavity, and the presence of the coating layer results in a mitigation of at least one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.
Claims7
A thin film bulk acoustic resonator, comprising:
- a first electrode, wherein the thin film bulk acoustic resonator is fabricated on a substrate and wherein the substrate has a cavity created in a top surface of the substrate;
- a piezoelectric layer overlying at least part of the first electrode;
- a second electrode overlying at least part of the piezoelectric layer;
- a coating layer comprising multiple layers, comprising:
- a first layer comprising silicon dioxide that overlays at least a part of the substrate surface in the cavity and a second layer comprising aluminum nitride that overlays at least part of the first layer, wherein the coating layer coats at least part of a substrate surface in the cavity.
Dependencies are inferred from the claim text.