Solid-state image pickup device and manufacturing method thereof

A method of manufacturing a solid-state image pickup device characterized by the comprising:

• solid-state image pickup device having plural pixels integrated in an array configuration on a semiconductor substrate;
• each pixel has the following parts:
• a photodiode that receives light and generates and accumulates photoelectric charge, a transfer transistor that transfers said photoelectric charge from said photodiode, a floating diffusion to which said photoelectric charge is transferred via said transfer transistor, an accumulating capacitive element that is set via said transfer transistor to said photodiode and that accumulates the photoelectric charge overflowing from said photodiode via said transfer transistor in the accumulating operation, and an accumulating transistor that connects or divides the potentials of said floating diffusion and said accumulating capacitive element, with one source/drain region becoming said floating diffusion and with the other source/drain region being connected to said accumulating capacitive element comprising:
• forming an element separating insulating film for dividing the active region in the first semiconductor layer of the first electroconductive type of said semiconductor substrate;
• forming second semiconductor layer of the first electroconductive type in contact with said element separating insulating film in said first semiconductor layer such that its shape covers at least a side surface of said element separating insulating film;
• and
• forming a third semiconductor layer of the second electroconductive type such that a joint plane is formed on the outer layer portion of said first semiconductor layer between it and said second semiconductor layer;
• wherein at least one of said source/drain regions that form said accumulating transistor is formed such that the depletion layer that extends from said joint plane when said solid-state image pickup device is turned ON does not reach the side surface of said element separating insulating film.