US 7,479,645 B2Granted

Device for producing extreme UV radiation

AssigneeUshiodenki Kabushiki Kaisha

InventorsHironobu Yabuta, Taku Sumitomo

Life of this patent

Estimating the term…

Loading patent…

Abstract

An extreme UV radiation producing device in which adhesion of solid tin in the vacuum pump of an evacuation device is restricted, so that the maintenance period and the replacement period of the pump is prolonged is achieved by the provision of a treatment unit between a radiation source chamber and the evacuation device. The treatment device has a hydrogen radical producing part in which tin and/or a tin compound in the evacuated gas from the radiation source chamber is/are made into a tin hydride; and a heat treatment part in which the tin hydride is thermally decomposed and in which the tin produced liquefied and separated from the evacuated gas. The liquid tin is fed into a collecting/storage vessel and the evacuated gas from which the tin and/or a tin compound has been removed fed to the evacuation device.

Claims6

Dependent claims

Device for producing extreme UV radiation, comprising:

a vessel for producing a high density and high temperature plasma;
a raw material supply means for supplying a raw material which contains at least one of tin and a tin compound in order to feed as a species for extreme UV radiation into the vessel;
a means for heating and excitation which heats and excites the raw material which has been delivered to the vessel and which produces a high density and high temperature plasma;
an evacuation device which is connected to the vessel;
an extreme UV radiation exit part which extracts extreme UV radiation which is emitted from the high density and high temperature plasma;
and
a treatment unit between the vessel and the evacuation device, the treatment unit having means for separating at least one of tin and a tin compound from a evacuated gas which is released from the vessel and which contains at least one of tin and a tin compound.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 11/459,142Filed 21 Jul 2006
Priority: JP 2005-21198221 Jul 2005
Published: US 2007/0018119 A125 Jan 2007
Granted: 20 Jan 2009
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H05G 2/0035
The plasma being generated from a material in a liquid or gas state: the material containing metals as principal radiation-generating components
B82Y 10/00
Nanotechnology for information processing, storage or transmission
G21K 2201/061
Using diffractive, refractive or reflecting elements: characterised by a multilayer structure
G21K 2201/064
Using diffractive, refractive or reflecting elements: having a curved surface