Methodology for critical dimension metrology using stepper focus monitor information

A method of producing an optimum critical dimension value, said method comprising:

• generating a scanning electron microscope focus;
• generating a waveform data based on output from said scanning electron microscope focus;
• analyzing said waveform data to determine an approximate critical dimension measurement;
• calibrating said waveform data by determining at least three best fit data parameters for improving a linearity of said waveform data;
• analyzing said waveform data to determine a stepper focus parameter;
• combining said stepper focus parameter with said approximate critical dimension measurement and said best fit data parameters, wherein said combining removes structural bias from said approximate critical dimension measurement;
• and
• generating said optimum critical dimension value from said combining, wherein said optimum critical dimension value comprises structural measurements of a critical dimension structure that are only relevant to a critical dimension of said critical dimension structure.

A method of producing an optimum critical dimension value, said method comprising:

• generating a scanning electron microscope focus;
• generating an image data based on output from said scanning electron microscope focus;
• analyzing said image data to determine an approximate critical dimension measurement;
• calibrating said image data by determining at least three best fit data parameters for improving a linearity of said image data;
• analyzing said image data to determine a stepper focus parameter;
• combining said stepper focus parameter with said approximate critical dimension measurement and said best fit data parameters, wherein said combining removes structural bias from said approximate critical dimension measurement;
• and
• generating said optimum critical dimension value from said combining, wherein said optimum critical dimension value comprises structural measurements of a critical dimension structure that are only relevant to a critical dimension of said critical dimension structure.

A method of producing an optimum critical dimension value, said method comprising:

• acquiring data representative of a critical dimension structure;
• determining a stepper focus parameter for said critical dimension structure;
• measuring an approximate critical dimension measurement for said critical dimension structure;
• calibrating said data by determining at least three best fit data parameters for improving a linearity of said data;
• combining said stepper focus parameter with said approximate critical dimension measurement and said best fit data parameters, wherein said combining removes structural bias parameters from said approximate critical dimension measurement;
• and
• generating said optimum critical dimension value based on said combining, wherein said optimum critical dimension value comprises structural measurements of said critical dimension structure that are only relevant to a critical dimension of said critical dimension structure.

A method of producing an optimum critical dimension value, said method comprising:

• acquiring data representative of a critical dimension structure;
• determining a stepper focus parameter for said critical dimension structure;
• measuring an approximate critical dimension measurement for said critical dimension structure;
• calibrating said data by determining at least three best fit data parameters for improving a linearity of said data;
• combining said stepper focus parameter with said approximate critical dimension measurement and said best fit data parameters, wherein said combining removes structural bias parameters from said approximate critical dimension measurement;
• and
• generating said optimum critical dimension value based on said combining, wherein said optimum critical dimension value comprises structural measurements of said critical dimension structure that are only relevant to a critical dimension of said critical dimension structure;
• wherein said determining further comprises:
• navigating to a stepper focus monitor target;
• performing a scanning electron microscope focusing at said target;
• performing a final alignment of said target based on said scanning electron microscope focusing at said target;
• acquiring a first data set from said scanning electron microscope focusing;
• analyzing said first data set;
• and
• determining said stepper focus parameter based on said analyzing;
• wherein said generating further comprises:
• navigating to said critical dimension structure;
• performing a scanning electron microscope focusing at said critical dimension structure;
• performing a final alignment of said critical dimension structure;
• acquiring a second data set from said scanning electron microscope focusing at said critical dimension structure;
• analyzing said second data set;
• and
• determining said optimum critical dimension value based on said analyzing.

A program storage device readable by a computer, tangibly embodying a program of instructions executable by the computer to perform a method of producing an optimum critical dimension value, said method comprising:

• acquiring a waveform of data for a critical dimension structure;
• determining a stepper focus parameter for said critical dimension structure;
• calculating an approximate critical dimension measurement for said critical dimension structure;
• calibrating said data of said waveform by determining at least three best fit data parameters for improving a linearity of said waveform;
• combining said stepper focus parameter with said approximate critical dimension measurement and said best fit data parameters, wherein said combining removes structural bias parameters from said approximate critical dimension measurement;
• and
• generating said optimum critical dimension value from said combining, wherein said optimum critical dimension value comprises structural measurements of said critical dimension structure that are only relevant to a critical dimension of said critical dimension structure.