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US 7,479,617 B2Granted
Monitoring slot formation in substrates
AssigneeHewlett-Packard Development Company, L.P.
InventorsGraeme Scott, Seamus O'Brien, Iain Campbell-Brown
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Abstract
A light beam is used to cut a slot in a first side of substrate. An optical sensor monitors a surface of a second side of the substrate that is opposite the first side while cutting the slot. If the light beam breaks through the surface of the second side, the sensor detects the light beam.
Claims6
A method of forming a fluid-ejection device, comprising:
- forming a first portion of a feed channel in a substrate, starting at a first side of the substrate, using a light beam in conjunction with a water-containing jet;
- monitoring a surface of a second side of the substrate that is opposite the first side, using an optical sensor, while forming the first portion of the feed channel;
- detecting the light beam, using the sensor, if the light beam breaks through the surface of the second side;
- and
- forming a second portion of the feed channel using the light beam in conjunction with an air jet after the first portion reached a predetermined depth.
2 more elements
Dependencies are inferred from the claim text.