Array substrate for liquid crystal display device and fabricating method of the same

A fabricating method of an array substrate for a liquid crystal display device, comprising:

• forming a gate line, a gate pad, a gate electrode, and a data pad on a substrate through a first mask process;
• forming a gate insulating layer on a substantial part of an entire surface of the substrate including the gate line, the gate pad, the gate electrode, and the data pad;
• forming a data line, a source-drain pattern and an active layer on the gate insulating layer and forming a gate pad contact hole and a data pad contact hole in the gate insulating layer through a second mask process using a mask including a blocking portion, a transmitting portion, and a half transmitting portion, wherein the half transmitting portion includes a first half transmitting portion and a second half transmitting portion, the first half transmitting portion having wider slits than the second half transmitting portion, the second half transmitting portion corresponding to the gate line, the gate pad and the data pad;
• and
• forming a pixel electrode, a gate pad terminal, a data pad terminal, a source electrode, a drain electrode, and an ohmic contact layer through a third mask process.