Method for manufacturing contact structure of pixel electrode of liquid crystal display device
AssigneeAu Optronics Corporation
InventorWen-Yi Shyu
Life of this patent
Estimating the term…
Loading patent…
AssigneeAu Optronics Corporation
InventorWen-Yi Shyu
Estimating the term…
A method for manufacturing a pixel electrode contact structure of a thin-film transistors liquid crystal display is disclosed. First, a transparent substrate having a first insulating layer thereon is provided. Afterward, a first metal layer and a second metal layer are sequentially formed on the substrate and then be patterned by a halftone technology and an etching process, wherein the second metal layer is removed within the pixel electrode contact area. In the meantime, the drain lines of the thin-film transistor comprising the first metal layer and the second metal layer are formed. Next, a patterned passivation layer is formed on the substrate. Finally, a pixel electrode layer directly connecting the first metal layers within the pixel electrode contact structure is formed on the substrate. This invention provides the pixel electrode contact structure with low contact resistance and prevents the current leakage from the drain line to the storage capacitor.
A method for manufacturing a contact structure of a pixel electrode of a liquid crystal display device, comprising the steps of:
Dependencies are inferred from the claim text.