Method for fabricating semiconductor package with circuit side polymer layer
AssigneeMicron Technology, Inc.
InventorsMike Connell, Tongbi Jiang
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Abstract
A semiconductor package includes a substrate, a die attached and wire bonded to the substrate, and a die encapsulant encapsulating the die. The die includes a circuit side having a pattern of die contacts, planarized wire bonding contacts bonded to the die contacts, and a planarized polymer layer on the circuit side configured as stress defect barrier. A method for fabricating the package includes the steps of forming bumps on the die, encapsulating the bumps in a polymer layer, and then planarizing the polymer layer and the bumps to form the planarized wire bonding contacts. The method also includes the steps of attaching and wire bonding the die to the substrate, and then forming the die encapsulant on the die.
Claims8
A method for fabricating a semiconductor package comprising:
- providing a semiconductor die comprising a circuit side, a plurality of die contacts on the circuit side, and an electrically insulating layer on the circuit side;
- forming a plurality of bumps on the die contacts;
- forming a polymer layer on the insulating layer and on the bumps;
- planarizing the polymer layer and the bumps;
- providing a substrate comprising a plurality of conductors comprising a plurality of first bonding pads and a plurality of second bonding pads;
- attaching the die to the substrate;
- bonding wires to the bumps and to the first bonding pads;
- forming a die encapsulant on the die with the polymer layer preventing physical contact between the die encapsulant and the circuit side;
- and
- forming a plurality of terminal contacts on the second bonding pads.
Dependencies are inferred from the claim text.