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US 7,479,404 B2Granted
Photonic crystal biosensor structure and fabrication method
AssigneeThe Board of Trustees of the University of Illinois
InventorsBrian T. Cunningham, Ian Block, Leo Li-Ying Chan
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Abstract
The invention provides sensor compositions and method of making sensors.
Claims30
A method of making a sensor comprising:
- (a) putting a liquid elastomer into a sub-wavelength period grating structure mold and curing the liquid elastomer to a form a negative mold;
- (b) removing the negative mold from the mold;
- (c) setting the negative mold into an uncured nanoporous film, wherein the uncured nanoporous film is supported by a substrate;
- (d) allowing the nanoporous film to fully cure, partially cure or not cure;
- (e) removing the negative mold from the fully cured, partially cured, or uncured nanoporous film;
- (f) depositing a high dielectric constant dielectric material onto the fully cured, partially cured, or uncured nanoporous film, wherein a sensor is formed.
3 more elements
A method of making a sensor comprising:
- (a) curing a layer of nanoporous material having a low refractive index onto a substrate;
- (b) depositing a high dielectric constant dielectric material on top of the nanoporous material;
- and
- (c) patterning the high dielectric constant dielectric material into a sub-wavelenth period grating structure.
1 more element
Dependencies are inferred from the claim text.