Method of monitoring a production process using a linear combination of measured variables with selected weights
AssigneeInfineon Technologies AG
InventorsFerdinand Bell, Dirk Knobloch, Knut Voigtländer, Jan Zimpel
Life of this patent
Estimating the term…
Abstract
The invention relates to a method for monitoring a manufacturing process, which by using a linear combination of measured variables with judiciously chosen weighting, produces a suitable (optimal) signal for determining each parameter. The extraction of the parameters from the measured variables is thus greatly simplified and in many cases becomes actually possible for the first time. According to the invention, large amounts of data may now be prepared, such that the crucial information (parameters) can be obtained from the data, almost in real time, or in real time.
Claims20
A method of monitoring a production process, which comprises:
- determining intensities of various wavelengths in an emission spectrum at predefined times;
- forming at least one linear combination from the intensities of various wavelengths, and selecting weights of the linear combination such that a predefined curve shape is approximated;
- and
- determining at least one characteristic variable from the linear combination.
A method of monitoring a production process, which comprises:
- determining intensities of various wavelengths in an emission spectrum of a plasma process at predefined times;
- forming at least one linear combination from the intensities of various wavelengths, and selecting weights of the linear combination such that a predefined curve shape is approximated;
- and
- determining an end point of the plasma process from the linear combination.
Dependencies are inferred from the claim text.