Adjustable height PIF probe
AssigneeLam Research Corporation
InventorsChristopher Kimball, Eric Hudson, Douglas Keil, Alexei Marakhtanov
Life of this patent
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Abstract
A plasma probe assembly for use in a plasma processing chamber is provided. A semiconductor probe element with a probe surface at a first end of the semiconductor probe element is provided. An electrical connector is electrically connected to the semiconductor probe element. An electrically insulating sleeve surrounds at least part of the probe element. An adjustment device is connected to the semiconductor probe so that the probe surface is coplanar with an interior chamber surface of the plasma processing chamber.
Claims20
A plasma probe assembly for use in a plasma processing chamber, comprising:
- a probe element with a probe surface at a first end of the probe element;
- an electrical connector electrically connected to the probe element;
- an electrically insulating sleeve surrounding at least part of the probe element;
- and
- an adjustment device connected to the probe element to adjust the probe element so that the probe surface is coplanar with an interior chamber surface of the plasma processing chamber.
A plasma probe assembly for use in a plasma processing chamber, comprising:
- a semiconductor probe element with a semiconductor probe surface at a first end of the semiconductor probe element;
- an electrical connector electrically connected to a second end of the semiconductor probe element;
- an electrically insulating sleeve surrounding at least part of the probe element;
- an adjustment device connected to the semiconductor probe element to adjust the semiconductor probe element so that the probe surface is coplanar with an interior chamber surface of the plasma processing chamber;
- a sleeve adjustment device for adjusting the electrical insulating sleeve, wherein the electrically insulating sleeve has an external edge and the sleeve adjustment device adjusts the external edge to be coplanar to the probe surface;
- and
- sensing electronics electrically connected to the electrical connector, wherein the sensing electronics comprises an ammeter.
Dependencies are inferred from the claim text.