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US 7,478,710 B2Granted
Vacuum pump vibration isolator
OwnerRami Ben-Maimoninventor
Life of this patent
Estimating the term…
Abstract
A damper mechanism for isolating vibrations from a vacuum pump constructed and adapted for coupling to a vacuum chamber, the damper mechanism including an elastomeric material, preferably an elastomer diaphragm, coupled between the pump and the vacuum chamber so as to permit the pump to move in six degrees of freedom, while transferring minimum force to the chamber.
Claims11
A vibration isolator for isolating vibrations from a vacuum pump constructed and adapted for coupling to a vacuum chamber, the vibration isolator comprising:
- a sealing mechanism including an elastomeric material forming a resilient seal between the pump and the vacuum chamber, permitting the pump to move in six degrees of freedom, while transferring minimum force to the chamber;
- said sealing mechanism including two elastomer diaphragms sealingly mounted as a sandwich between the pump and the vacuum chamber,
- said sealing mechanism further comprising intermediate pumping means for providing vacuum between said diaphragms;
- and
- a damping mechanism, for damping vibrations, for mounting between the pump and the vacuum chamber.
2 more elements
A method for isolating vibrations from a vacuum pump coupled to a vacuum chamber, the method comprising:
- coupling a sealing mechanism including an elastomeric material to form a resilient seal between the pump and the vacuum chamber, permitting the pump to move in six degrees of freedom, while transferring minimum force to the chamber;
- said coupling including:
- coupling two elastomer diaphragms as a sandwich between the pump and the vacuum chamber, and
- providing intermediate pumping means for creating vacuum between said diaphragms;
- and
- mounting a damper for damping vibrations between the pump and the vacuum chamber.
3 more elements
Dependencies are inferred from the claim text.