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US 7,477,123 B2Granted
Planar inductor using liquid metal MEMS technology
AssigneeAgilent Technologies, Inc.
InventorTimothy Beerling
Life of this patent
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Abstract
Using MEMS device design and fabrication techniques, liquid metal inductors can be formed. Because of the common fabrication techniques, liquid metal inductors can be more easily integrated with certain MEMS microswitches.
Claims18
An apparatus comprising:
- a device substrate;
- an inductor channel at least partially defined by a portion of the device substrate, wherein the inductor channel further comprises at least one of a generally spiral shape, and a plurality of substantially parallel channel segments;
- and
- a liquid conductor disposed in the inductor channel, wherein the liquid conductor is liquid at an operating temperature of the apparatus.
1 more element
An apparatus comprising:
- a device substrate;
- an inductor channel at least partially defined by a portion of the device substrate, wherein the inductor channel further comprises at least one of a generally spiral shape, and a plurality of substantially parallel channel segments;
- a liquid conductor disposed in the inductor channel;
- and
- a plurality of electrodes exposed to a surface of the inductor channel, wherein the electrodes are operable to couple the liquid conductor to another circuit element, wherein at least two of the plurality of electrodes are alternately selectable so as to vary an inductance of the liquid conductor disposed in the inductor channel.
2 more elements
An apparatus comprising:
- an electrically conductive liquid means, wherein the electrically conductive liquid means is liquid at an operating temperature of the apparatus;
- and
- a means for containing the electrically conductive liquid means in a generally spiral inductor shape.
Dependencies are inferred from the claim text.