A method for estimating at least one component placement position on a substrate at which a component is to be placed, wherein the component placement position is estimated on the basis of a position of at least one mark on the substrate, the method comprising the steps of:
- determining statistical measurement inaccuracies of the at least one mark by measuring one mark at a corresponding location on each of a plurality of substrates;
- estimating, on the basis of the statistical measurement inaccuracies of the at least one mark, the positional accuracy of the component placement position on the substrate;
- comparing the estimated positional accuracy of the component placement position with a desired positional accuracy;
- and
- determining whether the component is to be placed on the substrate with the estimated positional accuracy of the component placement position.