Process for the purification of aqueous peroxygen solutions, solutions obtainable thereby and their use
AssigneeSolvay (Societe Anonyme)
InventorsRobert Owen, Juergen Bosse, Michael Sell
Life of this patent
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Abstract
Process for the purification of aqueous peroxygen solutions comprising the treatment of an aqueous peroxygen solution with (a) at least one membrane purification step, (b) optionally at least one ion exchange purification step, (c) optionally at least one dilution step, and (d) at least one other purification step, all of which can be conducted in any sequence. Aqueous peroxygen solutions having a TOC level of less than 1 mg/kg can be obtained by this process. They can be used in the manufacture of semiconductors.
Claims21
A process for the purification of an aqueous hydrogen peroxide solution comprising the treatment of an aqueous hydrogen peroxide solution first with a reverse osmosis membrane purification, and afterwards with at least one other purification selected from the group consisting of exposure to ultraviolet light, exposure to ozone, contact with at least one adsorption resin, and any combination thereof.
A process for the purification of an aqueous hydrogen peroxide solution comprising the treatment of an aqueous hydrogen peroxide solution first with a reverse osmosis membrane purification, and afterwards with at least one other purification selected from the group consisting of exposure to ultraviolet light, exposure to ozone, contact with at least one adsorption resin, and any combination thereof,
- wherein the other purification includes exposure to ozone.
Dependencies are inferred from the claim text.