Resistive thermal sensing
AssigneePalo Alto Research Center Incorporated
InventorsMichal V. Wolkin, Dirk De Bruyker, Eric Peeters, Alan Bell
Life of this patent
Estimating the term…
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AssigneePalo Alto Research Center Incorporated
InventorsMichal V. Wolkin, Dirk De Bruyker, Eric Peeters, Alan Bell
Estimating the term…
Thermal sensors for calorimetry can include vanadium oxide, heavily p-doped amorphous silicon, or other materials with high temperature coefficients of resistivity. Such thermal sensors can have low noise equivalent temperature difference (NETD). For example, a thermal sensor with NETD no greater than 100 μK over a bandwidth range of approximately 3 Hz or more can include a thermistor including vanadium oxide sputtered at room temperature under conditions that yield primarily V2O5; more specifically, the NETD can be no greater than 35 μK, or even 10 μK over a bandwidth range of approximately 3 Hz or more. If a low noise thermal sensor has NETD no greater than 50 μK over such a bandwidth range, a low noise output circuitry connected to its thermistor can provide an electrical output signal that includes information about input thermal signal peaks with amplitude of approximately 100 μK.
A calorimeter comprising:
A calorimeter comprising:
A calorimeter comprising:
A calorimeter comprising:
An array comprising:
A calorimeter comprising:
A method of producing a calorimeter, comprising:
A calorimeter comprising:
Dependencies are inferred from the claim text.