Optical spot grid array scanning system

An apparatus for scanning a surface, comprising:

• a beam generator for generating an array of optical beams, the beam generator comprising a light source which projects a source beam alone a source axis;
• beam optics having an optical axis, said beam optics adapted to focus the array of optical beams to illuminate a region of the surface intercepted by the optical axis, wherein each optical beam illuminates a portion of a respective sub-region within the region;
• a translator for translating at least one of the array and the surface to cause a surface velocity relative to the optical axis in a first direction;
• and
• an array scanner, for scanning, during the translating, each of the optical beams over the respective sub-region in a second direction, different from the first direction, said scanning defining an array of raster patterns, each raster pattern covering a respective sub-region and comprising rows perpendicular to said first direction,
• wherein the array scanner comprises a deflector which deflects the source beam from the source axis and said scanning comprising scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, thereby repeating said raster pattern over a new region of the surface, and
• wherein the deflector comprises a plane mirror adapted to variably deflect the source beam.

An apparatus for scanning a surface, comprising:

• a beam generator for generating an array of optical beams, the beam generator comprising a light source which projects a source beam along a source axis;
• beam optics having an optical axis, said beam optics adapted to focus the array of optical beams to illuminate a region of the surface intercepted by the optical axis, wherein each optical beam illuminates a portion of a respective sub-region within the region;
• a translator for translating at least one of the array and the surface to cause a surface velocity relative to the optical axis in a first direction;
• and
• an array scanner, for scanning, during the translating, each of the optical beams over the respective sub-region in a second direction, different from the first direction, said scanning defining an array of raster patterns, each raster pattern covering a respective sub-region and comprising rows perpendicular to said first direction,
• wherein the array scanner comprises a deflector which deflects the source beam from the source axis and said scanning comprising scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, thereby repeating said raster pattern over a new region of the surface, and
• wherein the deflector comprises a polygonal plane mirror having an axis of symmetry, and wherein the polygonal plane mirror is adapted to rotate about said axis of symmetry.

A method for scanning a surface, comprising:

• generating an array of optical beams from a light source which projects a source beam along a source axis;
• focusing the array of optical beams using optics having an optical axis, so as to illuminate a region of the surface intercepted by the optical axis, wherein each optical beam illuminates a portion of a respective sub-region within the region;
• translating at least one of the array of optical beams and the surface so as to cause a surface velocity relative to the optical axis in a first direction;
• and
• during said translating, scanning the array of optical beams over the region in a second direction, different from the first direction, by deflecting the source beam from the source axis using an acousto-optic deflector (AOD) to adjustably deflect the source beam, said scanning defining an array of raster patterns, each said raster pattern covering a respective sub-region and comprising rows perpendicular to said first direction, said scanning comprising:
• scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, thereby repeating said raster pattern over a new region of the surface.

A method for scanning a surface, comprising:

• generating an array of optical beams from a light source which projects a source beam along a source axis;
• focusing the array of optical beams using optics having an optical axis, so as to illuminate a region of the surface intercepted by the optical axis, wherein each optical beam illuminates a portion of a respective sub-region within the region;
• translating at least one of the array of optical beams and the surface so as to cause a surface velocity relative to the optical axis in a first direction;
• and
• during said translating, scanning the array of optical beams over the region in a second direction, different from the first direction, by deflecting the source beam from the source axis using a plane mirror to variably deflect the source beam, said scanning defining an array of raster patterns, each said raster pattern covering a respective sub-region and comprising rows perpendicular to said first direction, said scanning comprising:
• scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, thereby repeating said raster pattern over a new region of the surface.

A method for scanning a surface, comprising:

• generating an array of optical beams from a light source which projects a source beam along a source axis:
• focusing the array of optical beams using optics having an optical axis, so as to illuminate a region of the surface intercepted by the optical axis, wherein each optical beam illuminates a portion of a respective sub-region within the region;
• translating at least one of the array of optical beams and the surface so as to cause a surface velocity relative to the optical axis in a first direction;
• and
• during said translating, scanning the array of optical beams over the region in a second direction, different from the first direction, by deflecting the source beam from the source axis by rotating a polygonal plane mirror having an axis of symmetry about said axis of symmetry, said scanning defining an array of raster Patterns, each said raster pattern covering a respective sub-region and comprising rows perpendicular to said first direction, said scanning comprising:
• scanning a predetermined number of said rows, and then jumping in a direction substantially opposite to the first direction, thereby repeating said raster pattern over a new region of the surface.